Products

Digital Holographic Macroscope – Large Field of View 3D Sensor

  • Real-time 3D topography with large field of view
  • Non-contact 3D imaging with nanometric vertical resolution
  • No scanning mechanism – vibration resistant
Contact Us
Description

Digital Holographic Macroscope

The first macroscopic configuration of reflection DHM®. It enables measurement of 3D topography with large field of view up to 32 x 32 mm. As with other DHM® products, the macro-sensor is a non-scanning instrument recording 3D topography at unrivaled acquisition speed.

This new patented technology opens new applications where a sub-nanometric vertical resolution is required within an extended field of view compared to a standard microscope configuration.

Ready for automation

The macro-sensor has been developed for automated measurements, all the critical components are accessible outside of the sensor body:

  • Camera & fiber port on top
  • External laser source
  • Long working distance : 30mm
  • No moving parts inside the body

Configuration

The holographic macroscope has a fixed field of view and is available in single and dual wavelength configurations depending on the application.

A standalone configuration equipped with a motorized stage is ideal for R&D and semi-automation with an optical head only configuration available for integration with larger equipment.

Applications
  • Wafer Analysis
  • Large area characterisation
  • In-line automation
Specifications