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Reflection DHM Series – Live 3D Optical Profilometer

  • 3D topography in real time – up to 1000 fps
  • Non-contact 3D imaging
  • Nanometric resolution
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Description

Digital Holographic Microscope (DHM®) – Live 3D Optical Profilometer

The Live 3D Profilometer (4D) solution by DHM® provides a unique approach for 3D topography characterization. The DHM is a strictly non-scanning method acquiring the complete 3D topography with a single camera shot. Fast acquisition and simultaneous interaction and analysis with the sample provide new investigation and analysis possibilities. As well as vibration resistant 3D topographic measurement of totally and partially reflecting surfaces the DHM‘s live acquisition enables 3D measurements on moving and deformable samples.

High temporal resolution

  • 3D topography acquisition rate up to 1000 frames per second
  • Data acquisition time typically 100 μs (optionally 10 μs)

Live 3D measurement and analysis with metrological precision and stability

  • Large vertical measurement range, up to 200 μm without any scanning
  • Sub-nanometer vertical resolution
  • Laser based vertical calibration

Flexible instrument

  • Large working space around the sample for tooling and experimental set-up
  • Large choice of objectives to measure in various environmental conditions
  • Motorized Stages for fast stitching.
  • Ability to measure through a transparent window

Unique Add-ons

  • Exceptional performance for in-plane and out-of-plane MEMS characterisation (link)
  • DHM reflectometry module for structured thin film analysis

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Applications

Dynamical topography changes

  • Surface finish during wear test
  • Crystal shape during temperature cycles
  • Mobility and growth

3D automated microscopy

  • Industrial inspection of defects on solar wafer
  • Defects screening on semi-transparent microshells
  • Roughness on hip prosthesis

Static 3D topography

  • Micro-lenses
  • High aspect-ratio micro-optics
  • Steps certification

Surface finish analysis

  • Roughness according to ISO standard
  • Glass tube inner roughness
  • Roughness of a bearing ball
Options
  • Large range of microscope objectives (long working distance, immersion)
  • Manual and Motorized stages
  • Vacuum Stages and Probe Stations
  • Stroboscopic mode and MEMS Analysis software
  • Reflectometry module for structured thin film analysis
Video Overview