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DHM Holographic MEMS Analyser

  • Non-scanning method for reduced characterization time
  • Efficient comparison between simulations and MEMS devices
  • Measurement of samples that cannot be characterised with other methods
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Description

Digital Holographic Microscope (DHM®) – Holographic MEMS Analyser

The holographic MEMS analyser solution provides time sequences of the successive 3D topographies of a MEMS along its driving signal. This unique set of data contains an unrivalled wealth of information. In particular, in- and out-of-plane displacements and frequency response can be analysed at any location within the measurement field of view.

  • Record time sequence of 3D topographies up to 25MHz
  • Measure at any location without scanning
  • Up to 1000 data points per profile cut
  • Decouple In- & Out-of-plane displacement for any geometry

A complete MEM analysis solution:

The Lyncée Tec holographic MEMS analyzer includes a complete characterization environment including:

  • Platforms for sample probing
  • Vacuum and thermal chambers
  • Signal generator for MEMS with excitation up to 25 MHz
  • Recording of electrical response
  • DHM® T and R series for the 3D topography time sequence acquisition
  • Stroboscopic unit for measurement and MEMS excitation synchronization

Powerful Time Sequence Analysis Tools:

The MEMSTool software enables efficient analysis of 3D topography time-sequences in term of

  • Out-of-plane displacement from 5 pm to 50 microns
  • In-plane displacement from 1 nm (sub-pixel algorithms) to 5 mm
  • Bode and Fourier frequency response analysis
  • Vibration maps
Applications
  • MEMS Microphones
  • MEMS Actuators
  • MEMS Cantilevers
  • Optical MEMS
  • Inertial Sensors
  • Ultrasonic Transducers
  • Microhotplates
  • Surface Acoustic Wave (SAW) Imaging
Options
  • Large range of microscope objectives (long working distance, immersion)
  • Manual and Motorized stages
  • Vacuum Stages and Probe Stations
Video Overview